Miniaturisation in Sensor Technology - Digital Differential Pressure Sensors in SOIC16 Housing

AMSYS (Germany) presents the new pressures sensor SM9543 of Silicon Microstructures Inc especially designed for lowest pressure applications. The low pressure sensors which combine a new developed silicon measurement cell (MEMS) with a complex signal-conditioning ASIC are individually calibrated and temperature compensated during the production process.

With 14-Bit resolution and 1.5% accuracy across the whole temperature range of -5 to 65°C the sensor is extremely suitable for medical applications. The long time stability of 0.2% full-scale per year provides the user with high accuracy, excellent stability and long-term reliability.

The pressure sensor housing is based on standard surface mount technology standards and features a JEDEC compliant SOIC-16 footprint for straight-forward PCB design and assembly. The two vertical pres-sure ports allow an easy connection of hoses.

A digital pressure signal which behaves proportional to the pressure change is available via the I²C interface. Furthermore there is also a diagnostic display, which controls the measurement cell. Additionally the bridge signal can be measured as an analogue output signal.

The SM9543 is orderable as bidirectional differential version in the pressure range from -5mbar to +5mbar. The special feature of the bidirectional sensor is that they can measure under and over pressure symmetrically. 

The pressure sensors can be mounted directly on a standard printed circuit board. There is no need for an additional circuitry, such as a compensation network or microcontroller containing a customer correction algorithm.

The new low pressure sensors SM9543 are especially designed for medical applications, but can also be applied in HVAC applications, for ventilation control and in environment control measurement instruments. The sensors are also capable for gas flow respectively air-flow measurement. With the dual porting, a vacuum-gauge measurement is possible to minimise altitude errors due to changes in ambient pressure.

The cost-benefit ratio has been improved by increasing the performance and by consistent miniaturisation. Therefore the devices are absolutely suitable for price critical applications.